2022 Phenomenology-based Model Predictive Control of Electron Density in Ar/SF6 Capacitively Coupled Etch Plasma 본문 Author 권지원, 이인규, 박지훈 Journal Journal of the Korean Physical Society Year 2022 DOI student 수정 삭제 목록 이전글Development of neutron time-of-flight measurement system for 1.7-MV tandem proton accelerator with lithium target 22.04.22 다음글Reliable channel reservoir characterization and uncertainty quantification using variational autoencoder and ensemble smoother with multiple data assimilation 22.04.22