2024
Plasma heating characterization of the large area inductively coupled plasma etchers with the plasma information for managing the mass production
본문
- Author
- 김곤호
- Journal
- Physics of Plasmas
- Vol./ Page
- 31/7
- Year
- 2024
- All Authors
- Park, S[Park, Seolhye]; Park, Y[Park, Yoona]; Seong, J[Seong, Jaegu]; Lee, H[Lee, Haneul]; Bae, N[Bae, Namjae]; Roh, KB[Roh, Ki-baek]; Seo, R[Seo, Rabul]; Song, B[Song, Bongsub]; Kim, GH[Kim, Gon-Ho]
- P-ISSN
- 1070-664X
- DOI
- 10.1063/5.0202363