2024
Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate
본문
- Author
- 김곤호
- Journal
- Current Applied Physics
- Vol./ Page
- 61
- Year
- 2024
- All Authors
- Bae, N.[Bae, Namjae]; Kim, N.-K.[Kim, Nam-Kyun]; Lee, H.[Lee, Haneul]; Jang, Y.[Jang, Yunchang]; Park, S.[Park, Seolhye]; Kim, G.-H.[Kim, Gon-Ho]
- P-ISSN
- 1567-1739
- DOI
- 10.1016/j.cap.2024.01.014