2022 Plasma information-based virtual metrology (PI-VM) and mass production process control 본문 Author 김곤호 Journal Journal of the Korean Physical Society Vol./ Page Volume 80, Issue 8 Year 2022 DOI professor 수정 삭제 검색 목록 이전글Simulations of fusion edge plasmas by linear plasma devices: physics and plasma–material interactions 24.07.11 다음글Development of model predictive control of fluorine density in SF6/O2/Ar etch plasma by oxygen flow rate 24.07.11