특허 실적
"Numerical simulation of explosion using Smoothed Particle Hydrodynamics with variable smoothing length"
등록일 : 20201216 구분 : 대한민국
"Investigation of Electrode Bias Effect on Plasma Series Resonance Formation of VHF Driven Asymmetric Electrode CCP Using Transmission Line Model"
등록일 : 20210117 구분 : 대한민국
"Characteristics of Plasma density distribution in Focus ring region of VHF narrow gap CCP Etching reactor"
"Investigation of Distributed Dust Size from Tungsten during Transient High Heat Flux"
등록일 : 20210125 구분 : 대한민국
"Investigation of Distributed Dust from Tungsten during Transient High Heat Flux"
"Plasma information variable of electron temperature (PI-Te) analysis by deconvolution of optical signals"
"Application of PI-VM to Develop Automatic Process Controller (PI-APC) for Si Etching Processes"
"Improvement of Triple probe Measurement on non-Maxwellian Plasmas"
"Development of Si Etch Profile Virtual Metrology using Plasma Information(PI-VM) in SF6/O2/Ar Capacitively Coupled Plasma"
"Development of Virtual Metrology using Plasma Information(PI-VM) on GexSbyTez pattern etch for PRAM"
"Investigation of Collision Effect on Ion Incident Angle at Biased Target in Magnetized Hydrogen Plasma"
"Investigation of Distributed Dust Size from Crack on Tungsten during Transient High Heat Flux"
"Investigation of Plasma Distribution Dependency on Pattern Tilting in 300mm VHF-CCP Si Etch"
"북해유전 생산국의 네덜란드병 징후 분석"
등록일 : 20201104 구분 : 대한민국
"복합탄산염 채움재 기술의 파급효과 분석을 위한 산업연관분석연구"