Development of Virtual Metrology using Plasma Information(PI-VM) on GexSbyTez pattern etch for PRAM
본문
- 발명가
- 이명건
- 등록/출원일
- 20210117
- 구분
- 대한민국
The 8th International Conference on Microelectronics and Plasma Technology and The 9th International Symposium on Functional Materials