Development of Si Etch Profile Virtual Metrology using Plasma Information(PI-VM) in SF6/O2/Ar Capacitively Coupled Plasma
본문
- 발명가
- 권지원, 박지훈, 이하늘
- 등록/출원일
- 20210117
- 구분
- 대한민국
The 8th International Conference on Microelectronics and Plasma Technology and The 9th International Symposium on Functional Materials