Application of PI-VM to Develop Automatic Process Controller (PI-APC) for Si Etching Processes
본문
- 발명가
- 권지원, 박지훈, 이인규
- 등록/출원일
- 20210117
- 구분
- 대한민국
The 8th International Conference on Microelectronics and Plasma Technology and The 9th International Symposium on Functional Materials