Plasma information variable of electron temperature (PI-Te) analysis by deconvolution of optical signals
본문
- 발명가
- 박지훈, 권지원
- 등록/출원일
- 20210117
- 구분
- 대한민국
The 8th International Conference on Microelectronics and Plasma Technology and The 9th International Symposium on Functional Materials