Investigation of Electrode Bias Effect on Plasma Series Resonance Formation of VHF Driven Asymmetric Electrode CCP Using Transmission Line Model
본문
- 발명가
- 이인규, 이하늘, 박태준, 손성현, 배남재
- 등록/출원일
- 20210117
- 구분
- 대한민국
The 8th International Conference on Microelectronics and Plasma Technology and The 9th International Symposium on Functional Materials