Etch Profile Analysis on Taper angle using Convolution Neural Network in Narrow Gap VHF+LF driven CCP 본문 발명가 박지훈, 박태준, 배남재 등록/출원일 20221003 구분 일본 The 75th Annual Gaseous Electronics Conference 목록 이전글Development of Virtual Metrology using Plasma Information to Predict ACL Mask Shape in HAR Etch Process 24.07.11 다음글Upgrade of poloidal field coil power systems in VEST 24.07.11