2024
Data-driven plasma science based plasma etching process design in OLED mass production referring to PI-VM
본문
- Author
- 김곤호
- Journal
- Plasma Physics and Controlled Fusion
- Vol./ Page
- 66/2
- Year
- 2024
- All Authors
- Park, S[Park, Seolhye]; Seong, J[Seong, Jaegu]; Park, Y[Park, Yoona]; Noh, Y[Noh, Yeongil]; Lee, HE[Lee, Haneul]; Bae, N[Bae, Namjae]; Roh, KB[Roh, Ki-Baek]; Seo, R[Seo, Rabul]; Song, B[Song, Bongsub]; Kim, GH[Kim, Gon-Ho]
- P-ISSN
- 0741-3335
- DOI
- 10.1088/1361-6587/ad1ae5